Modular optical metrology set-up for hybrid surface process control
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
SurfaceSens offers you the possibility to combine unique metrology and inspection measuring principles in one single tool and thus allows maximum flexibility. The set-up, even for top and bottom sample measurement, with various optical sensors, like point, line and field of view sensors facilitates versatile results about several surface parameters, such as topography, roughness, TTV bow and warp, flatness, coplanarity, sample and layer thickness, and many others.
Retrofitting sensors opens further options for flexible adaptation to future measuring tasks, such as individual and exchangeable sample holders. You can solve your measurement tasks quickly, efficiently, and reliably - with FRT MicroProf plus SurfaceSens.
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